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1038

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    2003 AMAT Reflexion

    • Manufacturer: Amat
    • Model: Reflexion

    Yongin-si, South Korea
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    EBARA EPO222T

    • Manufacturer: Ebara
    • Model: EPO222T

    Wafer Reclaim Wafer size: 300mm

    Yongin-si, South Korea
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    C・R CS-60HD

    • Manufacturer: C・R

    Clean　Oven Wafer size: 200mm

    Yongin-si, South Korea
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    TOKYO SEIMITSU E-MF1000-100

    • Manufacturer: Accretech - Tokyo Seimitsu - TSK

    Wafer Thickness measurement Wafer size: 200mm

    Yongin-si, South Korea
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    TOKYO SEIMITSU Surfcom 578A

    • Manufacturer: Accretech - Tokyo Seimitsu - TSK
    • Model: Surfcom 578A

    Wafer Surface measurement Wafer size: 200mm

    Yongin-si, South Korea
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    2000 EBARA EPO-222A

    • Manufacturer: Ebara
    • Model: EPO-222A

    Wafer size: 8

    Yongin-si, South Korea
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    1997 EBARA EPO-223

    • Manufacturer: Ebara
    • Model: EPO-223

    Wafer size: 8

    Yongin-si, South Korea
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    2003 EBARA F-REX300S

    • Manufacturer: Ebara
    • Model: F-REX300S

    Wafer size: 12

    Yongin-si, South Korea
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    1996 NOVELLUS 676

    • Manufacturer: Lam Research - Novellus

    Wafer size: 8

    Yongin-si, South Korea
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    2004 AMAT REFLEXION

    • Manufacturer: Amat
    • Model: Reflexion

    Wafer size: 12

    Yongin-si, South Korea
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    AMAT Mirra

    • Manufacturer: Amat
    • Model: MIRRA

    Process : SON Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW

    Yongin-si, South Korea
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    AMAT MIRRA MESA

    • Manufacturer: Amat
    • Model: MIRRA MESA

    Wafer size: 200mm

    Yongin-si, South Korea
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    Applied Materials Reflexion

    • Manufacturer: Amat
    • Model: Reflexion

    Wafer size: 12"

    Yongin-si, South Korea
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    TOKYO SEIMITSU DFG-840

    • Manufacturer: Accretech - Tokyo Seimitsu - TSK

    Wafer Surface measurement Wafer size: 200mm

    Yongin-si, South Korea
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    RORZE 03RR8120-001-001

    • Manufacturer: RORZE

    Wafer exchanger Wafer size: 200mm

    Yongin-si, South Korea
4647484950