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1037

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    1997 EBARA EPO-223

    • Manufacturer: Ebara
    • Model: EPO-223

    Wafer size: 8

    Yongin-si, South Korea
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    2003 EBARA F-REX300S

    • Manufacturer: Ebara
    • Model: F-REX300S

    Wafer size: 12

    Yongin-si, South Korea
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    1996 NOVELLUS 676

    • Manufacturer: Lam Research - Novellus

    Wafer size: 8

    Yongin-si, South Korea
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    2004 AMAT REFLEXION

    • Manufacturer: Amat
    • Model: Reflexion

    Wafer size: 12

    Yongin-si, South Korea
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    AMAT Mirra

    • Manufacturer: Amat
    • Model: MIRRA

    Process : STI/SOD Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW

    Yongin-si, South Korea
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    AMAT Mirra

    • Manufacturer: Amat
    • Model: MIRRA

    Process : BPSG/ILD Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW

    Yongin-si, South Korea
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    2008 AMAT Mirra on track

    • Manufacturer: Amat

    Yongin-si, South Korea
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    EBARA EPO222T

    • Manufacturer: Ebara
    • Model: EPO222T

    Wafer Reclaim Wafer size: 300mm

    Yongin-si, South Korea
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    DS VM-2010

    • Manufacturer: TiSi

    Thickness Measurement Wafer size: 200mm

    Yongin-si, South Korea
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    DS VM-8200

    • Manufacturer: DS

    Thickness Measurement Wafer size: 200mm

    Yongin-si, South Korea
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    DISCO DFG-840

    • Manufacturer: Disco

    Back Grinder Wafer size: 200mm

    Yongin-si, South Korea
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    STRAUSBAUGH/DNS Model-6DS-SP/SP-W813-AS

    • Manufacturer: STRAUSBAUGH

    Wafer size: 8"

    Yongin-si, South Korea
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    STRAUSBAUGH/DNS Model-6DS-SP/SP-W813-AS

    • Manufacturer: STRAUSBAUGH

    Wafer size: 8"

    Yongin-si, South Korea
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    BUEHLER ｴｺﾒｯﾄ ｹﾝﾏｷ 6ｶﾞﾀ

    • Manufacturer: Buehler

    Yongin-si, South Korea
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    1999 EBARA EPO-222A

    • Manufacturer: Ebara
    • Model: EPO-222A

    Wafer size: 8

    Yongin-si, South Korea
4647484950