Used Etching Systems

TECHNICS PEIIA UPGRADE

• Manufacturer: Technics

TECHNICS PEIIA UPGRADE ONLY (REPLACE OLD CMOS LOGIC BOARD WITH NEW TOUCH SCREEN CONTROLLER) 1 YEAR WARRANTY ON NEW ELECTRONICS AND NEW VACUUM GAUGE WITH 2 SET POINTS. ANY EXTRA REPAIRS NEEDED ARE NOT INCLUDED AND...

OXFORD 80 UPGRADE

• Manufacturer: Oxford

OXFORD 80 UPGRADE (NEW TOUCH SCREEN CONTROLS) 1 YEAR WARRANTY ON NEW ELECTRONICS

BRANSON 3075

• Manufacturer: Branson

BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20″ QUARTZ BARREL INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL WITH NEW PLC CONTROL (1YEAR WARRANTY ON PLC)

PLASMA SCIENCES R.I.E. 200W

• Manufacturer: PLASMA SCIENCES

PLASMA SCIENCES R.I.E. 200W TABLE TOP REACTIVE ION ETCHER ONE WAFER UP TO 6″ DIAMETER PER CYCLE. TURBO PUMPED MICROPROCESSOR, CONTROLLED REBUILT ROUGHING PUMP MFC CONTROLS FOR 3 GASES

PLASMA SCIENCES R.I.E. 200W

• Manufacturer: PLASMA SCIENCES

PLASMA SCIENCES PLASMA SCIENCES R.I.E. 200W TABLE TOP REACTIVE ION ETCHER ONE WAFER UP TO 6″ DIAMETER PER CYCLE TURBO PUMPED MICROPROCESSOR CONTROLLED REBUILT ROUGING PUMP

BRANSON 2005 PLASMA ETCHER/ASHER

• Manufacturer: Branson

BRANSON BRANSON 2005 PLASMA ETCHER/ASHER PM 119 RF GENERATOR (500 WATTS) 10″ DIAM X 20″DEEP QUARTZ CHAMBER 3 GAS CAPABLILITY INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL

Hitachi M-308ATE Metal Etch System w/ Power Rack, Delatech 858 V-2 scrubber, Gas Cabinet

• Manufacturer: Hitachi
• Model: M-308ATE

Parts tool Used

STS / SPTS STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete

• Manufacturer: SPTS

Hitachi EC1 Transformer Unit Etch Chamber M-712E Trench Etcher Working Surplus

• Manufacturer: Hitachi
• Model: M-712E

“The front removable mounting brackets are slightly bent and the face is scuffed (see photos).” Hitachi EC1 Transformer Unit Etch Chamber M-712E Trench Etcher Working Surplus Inventory # A-19270, AA-1413 Removed ...

Hitachi 201A1 RF Cable 72 Foot 22M M-511E Microwave Plasma System Working

• Manufacturer: Hitachi
• Model: M-511E

Hitachi 201A1 RF Cable 72 Foot 22M M-511E Microwave Plasma System Working Removed from a Hitachi M-511E Microwave Plasma Etching System This item is working surplus. The physical condition is good, but there are ...

Hitachi M-511E Wafer Cassette Ergo Loader Assembly Working Surplus

• Manufacturer: Hitachi
• Model: M-511E

“Removed from a Hitachi M-511E Microwave Plasma Etching System.” Hitachi M-511E Wafer Cassette Ergo Loader Assembly Working Surplus Removed from a Hitachi M-511E Microwave Plasma Etching System. Installed Compone...