Used Mass Flow Controllers in Japan

Horiba Stec SEC-410LP

Gas: SiCl4 Flow: 300 CCM Device name: Mass flow controller (MFC)

Horiba Stec STEC SEC-4400RO

• Manufacturer: Horiba

Gas: CI2 Flow: 50SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

Gas:CF4 Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec STEC SEC-4400MO

• Manufacturer: Horiba

Gas: CF4 Flow: 300 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:H2 Flow rate:200CCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2 Flow: 3LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

• Manufacturer: Horiba

Gas: O2 Flow: 1000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-510

• Manufacturer: Horiba

Gas:N2 Flow rate:20LM Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 20SCCM　Gas: O2 Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

Gas: CF4 Flow rate: 400SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

Gas: NH3 Flow rate: 50SCCM Device name: Mass flow controller (MFC)