Used Mass Flow Controllers in Japan

Tylan FC-770AC

Gas: SF6 Flow rate: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

Gas: O2 Flow rate: 10000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421Z

Gas: N2 Flow: 5 L/min Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4401M

• Manufacturer: Horiba

Gas: CH3OH Flow rate: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-F440M

Gas: 2%B2H6/N2 Flow: 1L/min Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 1000 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 100 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

SAM SFC-580MO4VD

O2 20sccm Device name: Mass flow controller

Tylan FC-770AC

Flow rate 20 SCCM Gas Ar Device name: Mass flow controller

Horiba Stec SEF-1R

Gas N2 Flow 20SLMW110 D30 H65 Device name: Mass flow controller

HORIBA STEC SEC-4400MO-UC

Gas O2 flow 500CCMW125 D31 H127 Device name: Mass flow controller