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Used etch/ash/clean plasma processing

  • Trusted Seller
    2001 STS MESC Multiplex ICP

    2001 STS MESC Multiplex ICP ASE

    • Manufacturer: STS

    STS ASE Multiplex ICP System (Bosch Process) OEM = Surface Technology Systems Limited (AKA: STS) Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch) Description of Pr...

    United States
  • GaSonics L3510 Single Wafer Ashing

    GaSonics L3510 Single Wafer Ashing System

    • Manufacturer: GaSonics

    The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L35...

    San Jose, CA
  • Gasonics 9104 plasma asher (never

    Gasonics 9104 plasma asher (never installed with new control box)

    • Manufacturer: GaSonics
    • Model: 9104

    Features and Specifications Gasonics/IPC 9104 Ash/Etch system 12"(dia) x 20"(D) quartz barrel soft pumping and purge valving low particulate design 2ea mass flow gas inputs with VCR fittings all SS plumbing, mul...

    $32,900 USD

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    Est. $619/mo

    San Jose, CA
  • Trusted Seller
    Gasonics 9104

    Gasonics 9104

    • Manufacturer: GaSonics
    • Model: 9104

    Gasonics 9104 plasma asher (never installed with new control box) Features and Specifications Gasonics/IPC 9104 Ash/Etch system 12"(dia) x 20"(D) quartz barrel soft pumping and purge valving low particulate ...

    United States
  • GaSonics 7104

    GaSonics 7104

    • Manufacturer: GaSonics

    The 7100 Series is the most popular of the GaSonics International industrial batch treatment and cleaning systems. This full-featured system is based on proven reactor features and system drivers developed over t...

    San Jose, CA
  • GaSonics Aura 1000

    GaSonics Aura 1000

    • Manufacturer: GaSonics

    The GaSonics Aura 1000 single-wafer photoresist asher is an automated tool designed as a flexible downstream plasma photoresist removal system for high-volume wafer fabrication. GaSonics offers the Aura in direct...

    San Jose, CA
  • Trusted Seller
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    Mattson Process chambers Module with New power plasma RPS Qty = 2

    • Manufacturer: Mattson

    Used, chamber only

    United States
  • Trusted Seller
    Axic Plasmamaster 200 Barrel Plasma

    Axic Plasmamaster 200 Barrel Plasma Cleaner

    • Manufacturer: Axic

    PlasmaSTAR ® 200 A Unique Modular Approach to Barrel Plasma Processing The PlasmaSTAR® Series of Plasma Processing Systems from Axic, Inc. defines a new concept in barrel plasma processing. The systems are based ...

    Trim, Ireland
  • Trusted Seller
    BRANSON/IPC 4055/2 Plasma Surface Treatment

    BRANSON/IPC 4055/2 Plasma Surface Treatment

    • Manufacturer: Branson

    Plasma Surface Treatment Tool with 5ea Shelf Electrodes. Prior to delivery this tool will be checked out and verified fully functional Sold Guaranteed fully Functional. BRANSON/IPC 4055/2 Plasma Surface Treatment...

    Trim, Ireland
  • Trusted Seller
    PlasmaQuest MOCVD reactor system with

    PlasmaQuest MOCVD reactor system with Thermal Scrubber and Neslab Chiller & Shimadsu DLI System

    • Manufacturer: Neslab

    The PlasmaQuest's MOCVD reactor system is a dual-chamber (thermal and plasma) MOCVD reactor with various equipment and peripherals including turbo pump, vane pump, thermal scrubber, chiller, specialty lines for g...

    Trim, Ireland
  • Trusted Seller
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    Polysilicone Etch

    • Manufacturer: Unknown

    Tool is stored in a storage room at Tower A in Fab 15. Double-confirmed with Fab 15 there is one missing part and no modifciation record. High-density plasma Polysilicon Etching system -Model: 300mm Silicon Etch ...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Polysilicone Etch

    • Manufacturer: Unknown

    Original PO details: Producer Etch 3 Twin Chamber (SYS3-00193322)… Wafer Specification Wafer Size and Shape -300mm SNNF (SYS-00157076) (Qty 1) Chamber Type/Location -Chamber A (EO) Poly Etch Twin (EPA-00157083) (...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Bevel Etch

    • Manufacturer: Unknown

    Tool is stored in a storage room as of March 25th, 2015. Confirmed with Fab 15 there is no missing part and is one damaged part, and no modification record. [Chamber A] Chamber type:Bevel Gas config. (sccm)=MFC f...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Dielectric Etch

    • Manufacturer: Unknown

    Tool was de-installed on August 22nd, 2014. Tool is wrapped and stored in a storage room in Fab 15. Confirmed with Fab 15 there are no missing & damaged parts, and no modification record as of January 30th, 2015....

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Dielectric Etch

    • Manufacturer: Unknown

    Condition: tool is on production Standard Specifications Software Revision: Linux 5.75 Rev 001 Lot Stability Dummy SW: Software for running lot stability wafer. OEE WPH Software: Yes GEM SEC Revision: TBD Wafer S...

    Bree, Ireland
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Overview

Ashers and etchers are specialized machines used primarily in semiconductor manufacturing and microfabrication processes. Ashers remove photoresist material from semiconductor wafers, while etchers precisely carve out patterns on these wafers to create intricate electronic circuits. They play a crucial role in the production of integrated circuits and other electronic components.

FAQ

What should I consider when buying a used asher or etcher?

Consider the machine's age, usage history, and overall condition. Check for any signs of wear and tear, and ensure that it has been properly maintained. Also, verify the compatibility with your specific manufacturing process.

How do I ensure the asher or etcher is shipped safely to my location?

Use a specialized transport service experienced in handling sensitive electronic equipment. Ensure the machine is properly packaged, secured, and protected against environmental factors during transit.

What is the maintenance schedule for an asher or etcher?

Regular maintenance includes cleaning and inspecting components, checking for any wear or damage, and ensuring all operating parameters are within the specified range. Consult the manufacturer’s manual for detailed maintenance intervals and procedures.